Técnicas de Micro e Nanofabricação

Objectives

To provide training in micro and nanofabrication techniques. To present the building blocks for nanodevice fabrication. To provide unique experimental resources where the students can understand the techniques learnt in classes supported by experimental work at the INESC MN’ s Clean Room (ISO 4/5).

Syllabus

1. Clean rooms: technical specifications, safety rules, classification (ISO).
2. Lithography techniques. Resolution and minimum features. Direct write, multilevel alignment, hard masks, software masks. 3) Techniques for pattern transfer: Subtractive (Etching) and Additive (Lift-off) - dimensions, materials, resist profiles, features profile. 4) Vacuum technologies for materials processing: principles and technologies. 5) Metal and dielectric film deposition: sputtering (PVD), ion beam (IBD), chemical vapour deposition (CVD), evaporation, electrodeposition. Materials process control. Industry requirements. 6) Local and global planarization techniques: application to complex multilevel architectures eg. MRAM and CMOS. 7) Industrial specifications. Large scale production, quality control. Metrology techniques for nano and microstructures 8) Microsystems for fluidics integration: microchannel fabrication, irreversible surface bonding, mould machining. Biosensor applications.

Cross Competence Component

Development of critical thinking and strategy (device design and device step by step fabrication) Development of interpersonal skills in the evaluation components of laboratory (involving oral discussions, written reporting and teamwork). Development of intrapersonal skills, at organization and methodology levels (the laboratory work is coordinated with INESC-MN and shares machines and processes, requiring time management, and decision-making upon metrology). Using several multimedia components (to produce the presentation and to answer on-line questionaires at each laboratory session) 60% of evaluation components.

Laboratorial Component

Conducting one laboratory session per week (in groups with 3-4 students), using INESC MN experimental facilities (http://www.inesc-mn.pt), to microfabricate a selected device. The sequence of steps needed for device fabrication and the corresponding metrology tools will be described in a written report (RunSheet). The laboratory component consists on 40% of the evaluation.

Ethical Principles

All members of a group are responsible for the group’s work In any assessment, every student shall honestly disclose any help received and sources used. In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.